截至2026年3月30日下午1时16分，上证科创板半导体材料设备指数（代码950125）表现强劲，涨幅达3.03%。其中，富创精密股价攀升7.93%，艾森股份上涨7.08%，华峰测控增长6.24%，华海清科、中微公司等其他成分股也跟随上行。鹏华科创半导体设备ETF（代码589020）同步上扬2.86%，现报每份1.33元。
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